Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc

Z. Gan, Y. Zhang, G. Yu, C. M. Tan, S. P. Lau, and B. K. Tay. “Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc,” Journal of Applied Physics, vol. 95, no. 8, pp. 3509, 2004.
https://aip.scitation.org/doi/abs/10.1063/1.1667005

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