Mechanical properties of Zirconia Thin Films deposited by filtered cathodic vacuum arc

Z. Gan, G. Yu, Z. Zhao, C. M. Tan, and B. K. Tay. “Mechanical properties of Zirconia Thin Films deposited by filtered cathodic vacuum arc,” Journal of the American Ceramic Society, vol. 88, no. 8, pp. 2227-2229, 2005.

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