Microstructure and mechanical properties of CrN films fabricated by high power pulsed magnetron discharge plasma immersion ion implantation and deposition

Z. Wu, X. Tian, Z. Wang, C. Gong, S. Yang, C. M. Tan, and P. K. Chu. “Microstructure and mechanical properties of CrN films fabricated by high power pulsed magnetron discharge plasma immersion ion implantation and deposition,” Applied Surface Science, vol. 258, no. 1, pp. 242-6, 15th Oct. 2011.
https://www.sciencedirect.com/science/article/pii/S0169433211012670

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