Overcoming intrinsic weakness of ULSI metallization electromigration performances

C. M. Tan and G. Zhang. “Overcoming intrinsic weakness of ULSI metallization electromigration performances,” Thin Solid Films, vol. 462-463, pp. 263-268, 2004
https://www.sciencedirect.com/science/article/pii/S004060900400639X

回到頂端